Understanding and Optimization of Gas Sensors Based on Metal Oxide Semiconductors

Understanding and Optimization of Gas Sensors Based on Metal Oxide Semiconductors

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Solid-state sensors are one of the most effective tools for detecting toxic and combustible gases, and semiconducting tin oxide is the most widely used material. However, present understanding of the mechanism of gas detection is still immature, and disadvantages such as lack of reproducibility and insufficient sensitivity are frequently observed. This research is aimed at understanding the sensing mechanism of metal oxide semiconductor based gas sensors fabricated by atomic layer deposition (ALD) techniques, and exploring the ways to optimize their sensing performance.Figure 1.9: Left: Schematic band diagram of the SnO2 bulk. ... Evac is the vacuum level; E c, b and Ec, s are the positions at the bottom of the conduction band with respect to the vacuum level in volume and on the surface of the semiconductor;anbsp;...


Title:Understanding and Optimization of Gas Sensors Based on Metal Oxide Semiconductors
Author: Xiaohua Du
Publisher:ProQuest - 2007
ISBN-13:

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